Campbell, Stephen A <br/><br/>
Science and engineering of microelectronic fabrication 

 -  Oxford University Press, Inc., New York  1996 
 - 534 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronics; Physics
<br/><br/><label>Dewey Class. No.: </label>PG 537.5  CAM-S