| 000 | 00405nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 170207s9999 xx 000 0 und d | ||
| 082 | _aPG 535 JOW-E | ||
| 100 | _aJowett, C E | ||
| 245 | _aEngineering of microelectronic thin and thick films | ||
| 260 | _bMacmillan Press Ltd., London | ||
| 260 | _c1976 | ||
| 300 | _a176 | ||
| 650 | _aLight & paraphotic phenomena (Optics); Physics | ||
| 942 | _cBOOKS | ||
| 999 |
_c17889 _d17889 |
||